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Rare-earth oxide based chamber material
An article comprises a plasma resistant ceramic material comprising 40-60 mol % of Y2O3, 35-50 mol % of ZrO2, and 10-20 mol % of Al2O3.
Rare-earth oxide based chamber material
An article comprises a plasma resistant ceramic material comprising 40-60 mol % of Y2O3, 35-50 mol % of ZrO2, and 10-20 mol % of Al2O3.
Rare-earth oxide based chamber material
SUN JENNIFER Y (author) / KANUNGO BIRAJA P (author)
2020-03-03
Patent
Electronic Resource
English