A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
RARE-EARTH OXIDE BASED CHAMBER MATERIAL
An article comprises a plasma resistant ceramic material comprising 80-90 mol % of Y2O3, over 0 mol % to 20 mol % of ZrO2, and 10-20 mol % of Al2O3.
RARE-EARTH OXIDE BASED CHAMBER MATERIAL
An article comprises a plasma resistant ceramic material comprising 80-90 mol % of Y2O3, over 0 mol % to 20 mol % of ZrO2, and 10-20 mol % of Al2O3.
RARE-EARTH OXIDE BASED CHAMBER MATERIAL
SUN JENNIFER Y (author) / KANUNGO BIRAJA P (author)
2018-02-15
Patent
Electronic Resource
English