A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Rare-earth oxide based chamber material
An article comprises a plasma resistant ceramic material comprising 80-90 mol % of Y2O3, over 0 mol % to 20 mol % of ZrO2, and 10-20 mol % of Al2O3.
Rare-earth oxide based chamber material
An article comprises a plasma resistant ceramic material comprising 80-90 mol % of Y2O3, over 0 mol % to 20 mol % of ZrO2, and 10-20 mol % of Al2O3.
Rare-earth oxide based chamber material
SUN JENNIFER Y (author) / KANUNGO BIRAJA P (author)
2020-03-10
Patent
Electronic Resource
English