A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Rare-earth oxide based chamber material
An article comprises a plasma resistant ceramic material comprising Y2O3 at a concentration of approximately 30 molar % to approximately 60 molar %, Er2O3 at a concentration of above 30 molar % to approximately 60 molar %, and at least one of ZrO2, Gd2O3 or SiO2 at a concentration of over 0 molar % to approximately 30 molar %.
Rare-earth oxide based chamber material
An article comprises a plasma resistant ceramic material comprising Y2O3 at a concentration of approximately 30 molar % to approximately 60 molar %, Er2O3 at a concentration of above 30 molar % to approximately 60 molar %, and at least one of ZrO2, Gd2O3 or SiO2 at a concentration of over 0 molar % to approximately 30 molar %.
Rare-earth oxide based chamber material
SUN JENNIFER Y (author) / KANUNGO BIRAJA P (author)
2021-03-02
Patent
Electronic Resource
English