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Composite sintered body, electrostatic chuck member, and electrostatic chuck device
A composite sintered body, wherein the composite sintered body consists of ceramic composite sintered body, the ceramic composite sintered body comprises aluminum oxide as a main phase, and silicon carbide as a sub-phase, in which the composite sintered body has mullite in crystal grains of the aluminum oxide.
Composite sintered body, electrostatic chuck member, and electrostatic chuck device
A composite sintered body, wherein the composite sintered body consists of ceramic composite sintered body, the ceramic composite sintered body comprises aluminum oxide as a main phase, and silicon carbide as a sub-phase, in which the composite sintered body has mullite in crystal grains of the aluminum oxide.
Composite sintered body, electrostatic chuck member, and electrostatic chuck device
HIDAKA NOBUHIRO (author) / KUGIMOTO HIRONORI (author)
2023-10-10
Patent
Electronic Resource
English
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