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    Composite sintered body, semiconductor manufacturing apparatus member, and method of producing composite sintered body

    New search for: ATSUJI KYOHEI
    New search for: MIYANISHI KEITA
    New search for: NAGAI ASUMI
    New search for: YAMAGUCHI HIROFUMI

    A composite sintered body includes a base material that includes ceramic as a main component, and an electrode arranged inside the base material or on a surface of the base material. The electrode contains W and ZrO2.

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    Composite sintered body, semiconductor manufacturing apparatus member, and method of producing composite sintered body

    New search for: ATSUJI KYOHEI
    New search for: MIYANISHI KEITA
    New search for: NAGAI ASUMI
    New search for: YAMAGUCHI HIROFUMI

    A composite sintered body includes a base material that includes ceramic as a main component, and an electrode arranged inside the base material or on a surface of the base material. The electrode contains W and ZrO2.

    Access

    Download

    Composite sintered body, semiconductor manufacturing apparatus member, and method of producing composite sintered body

    New search for: ATSUJI KYOHEI
    New search for: MIYANISHI KEITA
    New search for: NAGAI ASUMI
    New search for: YAMAGUCHI HIROFUMI

    A composite sintered body includes a base material that includes ceramic as a main component, and an electrode arranged inside the base material or on a surface of the base material. The electrode contains W and ZrO2.

    Access

    Download

    Access

    Download

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Composite sintered body, semiconductor manufacturing apparatus member, and method of producing composite sintered body

    Contributors:

    ATSUJI KYOHEI (author) / MIYANISHI KEITA (author) / NAGAI ASUMI (author) / YAMAGUCHI HIROFUMI (author)

    Publication date:

    2024-03-12

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    English

    Classification:

    IPC:  C04B Kalk , LIME / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES

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