A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
RARE-EARTH OXIDE BASED MONOLITHIC CHAMBER MATERIAL
An article comprises a plasma resistant ceramic material comprising 40 mol % to less than 100 mol % of Y2O3, above 0 mol % to 60 mol % of ZrO2, and above 0 mol % to 5 mol % of Al2O3.
RARE-EARTH OXIDE BASED MONOLITHIC CHAMBER MATERIAL
An article comprises a plasma resistant ceramic material comprising 40 mol % to less than 100 mol % of Y2O3, above 0 mol % to 60 mol % of ZrO2, and above 0 mol % to 5 mol % of Al2O3.
RARE-EARTH OXIDE BASED MONOLITHIC CHAMBER MATERIAL
SUN JENNIFER Y (author) / KANUNGO BIRAJA P (author)
2016-11-10
Patent
Electronic Resource
English