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    OXIDE SINTERED BODY AND SPUTTERING TARGET

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    An oxide sintered body includes a bixbyite phase represented by In2O3, and a garnet phase represented by Y3In2Ga3O12.

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    OXIDE SINTERED BODY AND SPUTTERING TARGET

    New search for: INOUE KAZUYOSHI
    New search for: TOMAI SHIGEKAZU
    New search for: SHIBATA MASATOSHI
    New search for: TAKESHIMA MOTOHIRO

    An oxide sintered body includes a bixbyite phase represented by In2O3, and a garnet phase represented by Y3In2Ga3O12.

    Access

    Download

    OXIDE SINTERED BODY AND SPUTTERING TARGET

    New search for: INOUE KAZUYOSHI
    New search for: TOMAI SHIGEKAZU
    New search for: SHIBATA MASATOSHI
    New search for: TAKESHIMA MOTOHIRO

    An oxide sintered body includes a bixbyite phase represented by In2O3, and a garnet phase represented by Y3In2Ga3O12.

    Access

    Download

    Access

    Download

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    OXIDE SINTERED BODY AND SPUTTERING TARGET

    Contributors:

    INOUE KAZUYOSHI (author) / TOMAI SHIGEKAZU (author) / SHIBATA MASATOSHI (author) / TAKESHIMA MOTOHIRO (author)

    Publication date:

    2019-07-18

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    English

    Classification:

    IPC:  C04B Kalk , LIME / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES

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