A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
MEMBER FOR PLASMA PROCESSING APPARATUS, PLASMA PROCESSING APPARATUS WITH THE SAME AND METHOD FOR USING SINTERED BODY
A member for a plasma processing apparatus has a tungsten carbide phase, and a sub-phase including at least one selected from the group consisting of phase I to IV, and phase V, in which the phase I is a carbide phase containing, as a constituent element, at least one of the elements of Group IV, V, and VI of the periodic table excluding W, the phase II is a nitride phase containing, as a constituent element, at least one of the elements of Group IV, V, and VI of the periodic table excluding W, the phase III is a carbonitride phase containing, as a constituent element, at least one of the elements of Group IV, Group V, and Group VI of the periodic table excluding W, the phase IV is a carbon phase, the phase V is a composite carbide phase which is represented by a formula WxMyCz.
MEMBER FOR PLASMA PROCESSING APPARATUS, PLASMA PROCESSING APPARATUS WITH THE SAME AND METHOD FOR USING SINTERED BODY
A member for a plasma processing apparatus has a tungsten carbide phase, and a sub-phase including at least one selected from the group consisting of phase I to IV, and phase V, in which the phase I is a carbide phase containing, as a constituent element, at least one of the elements of Group IV, V, and VI of the periodic table excluding W, the phase II is a nitride phase containing, as a constituent element, at least one of the elements of Group IV, V, and VI of the periodic table excluding W, the phase III is a carbonitride phase containing, as a constituent element, at least one of the elements of Group IV, Group V, and Group VI of the periodic table excluding W, the phase IV is a carbon phase, the phase V is a composite carbide phase which is represented by a formula WxMyCz.
MEMBER FOR PLASMA PROCESSING APPARATUS, PLASMA PROCESSING APPARATUS WITH THE SAME AND METHOD FOR USING SINTERED BODY
IKEDA TAKASHI (author) / ISHII HAJIME (author) / FUJIMOTO KENJI (author) / SATOH NAOYUKI (author) / NAGAYAMA NOBUYUKI (author) / MURAKAMI KOICHI (author) / MURAKAMI TAKAHIRO (author)
2020-10-08
Patent
Electronic Resource
English
| European Patent Office | 2020
| European Patent Office | 2022
CERAMIC SINTERED BODY AND MEMBER FOR PLASMA PROCESSING APPARATUS
| European Patent Office | 2021
Ceramic sintered body and member for plasma processing apparatus
| European Patent Office | 2024
Member for plasma processing apparatus and plasma processing apparatus with the same
| European Patent Office | 2023