A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Member for plasma processing apparatus and plasma processing apparatus with the same
Provided is a member for a plasma processing apparatus consisting of a tungsten carbide phase. The member includes at least one type of atom selected from the group consisting of a Fe atom, a Co atom, and a Ni atom, in which the total content of the atoms is in a range of 30 to 3300 atomic ppm.
Member for plasma processing apparatus and plasma processing apparatus with the same
Provided is a member for a plasma processing apparatus consisting of a tungsten carbide phase. The member includes at least one type of atom selected from the group consisting of a Fe atom, a Co atom, and a Ni atom, in which the total content of the atoms is in a range of 30 to 3300 atomic ppm.
Member for plasma processing apparatus and plasma processing apparatus with the same
IKEDA TAKASHI (author) / ISHII HAJIME (author) / FUJIMOTO KENJI (author) / SATOH NAOYUKI (author) / NAGAYAMA NOBUYUKI (author) / MURAKAMI KOICHI (author) / MURAKAMI TAKAHIRO (author)
2023-01-10
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
/
C23F
Nichtmechanisches Entfernen metallischer Stoffe von Oberflächen
,
NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES
/
H01J
Elektrische Entladungsröhren oder Entladungslampen
,
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
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