A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
CERAMIC HEATER AND METHOD OF MANUFACTURING THE SAME
A ceramic heater includes: a ceramic plate which is provided with a wafer placement surface on an upper surface and in which a heating resistor is internally embedded; a ceramic tubular shaft with an upper end bonded to a lower surface of the plate; and power feeding members which penetrate a peripheral wall part of the tubular shaft in a vertical direction, and are electrically connected to the heating resistor. The power feeding members are embedded in the peripheral wall part of the tubular shaft, and are in tight contact with a ceramic material of the tubular shaft.
CERAMIC HEATER AND METHOD OF MANUFACTURING THE SAME
A ceramic heater includes: a ceramic plate which is provided with a wafer placement surface on an upper surface and in which a heating resistor is internally embedded; a ceramic tubular shaft with an upper end bonded to a lower surface of the plate; and power feeding members which penetrate a peripheral wall part of the tubular shaft in a vertical direction, and are electrically connected to the heating resistor. The power feeding members are embedded in the peripheral wall part of the tubular shaft, and are in tight contact with a ceramic material of the tubular shaft.
CERAMIC HEATER AND METHOD OF MANUFACTURING THE SAME
NOBORI KAZUHIRO (author) / KIMURA TAKUJI (author) / MOTOYAMA SHUICHIRO (author)
2021-12-02
Patent
Electronic Resource
English
DEVICE FOR MANUFACTURING CERAMIC HEATER, AND METHOD OF MANUFACTURING CERAMIC HEATER
| European Patent Office | 2015
| European Patent Office | 2023