A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
COMPOSITE SINTERED BODY, SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER AND METHOD OF PRODUCING COMPOSITE SINTERED BODY
A composite sintered body includes a base material that contains Al2O3 as a main component, and an electrode arranged inside or on a surface of the base material. The electrode contains Ru, ZrO2, and Al2O3.
COMPOSITE SINTERED BODY, SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER AND METHOD OF PRODUCING COMPOSITE SINTERED BODY
A composite sintered body includes a base material that contains Al2O3 as a main component, and an electrode arranged inside or on a surface of the base material. The electrode contains Ru, ZrO2, and Al2O3.
COMPOSITE SINTERED BODY, SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER AND METHOD OF PRODUCING COMPOSITE SINTERED BODY
MIYANISHI KEITA (author) / ATSUJI KYOHEI (author) / NAGAI ASUMI (author) / YAMAGUCHI HIROFUMI (author) / AOYAGI SOICHIRO (author)
2022-03-17
Patent
Electronic Resource
English
IPC:
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
B32B
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
,
Schichtkörper, d.h. aus Ebenen oder gewölbten Schichten, z.B. mit zell- oder wabenförmiger Form, aufgebaute Erzeugnisse
/
C04B
Kalk
,
LIME
| European Patent Office | 2024
European Patent Office | 2022
| European Patent Office | 2022
| European Patent Office | 2024
European Patent Office | 2024