A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
GAS PLUG, ELECTROSTATIC ATTRACTION MEMBER, AND PLASMA TREATMENT DEVICE
A gas plug of the present disclosure is composed of a columnar porous composite in which a plurality of silicon compound phases containing silicon carbide as a main component are connected to each other via a silicon phase having silicon as a main component. The porous composite is housed inside a tubular body made from a dense ceramic.
GAS PLUG, ELECTROSTATIC ATTRACTION MEMBER, AND PLASMA TREATMENT DEVICE
A gas plug of the present disclosure is composed of a columnar porous composite in which a plurality of silicon compound phases containing silicon carbide as a main component are connected to each other via a silicon phase having silicon as a main component. The porous composite is housed inside a tubular body made from a dense ceramic.
GAS PLUG, ELECTROSTATIC ATTRACTION MEMBER, AND PLASMA TREATMENT DEVICE
KAWASE YUUJI (author) / NOGUCHI YUKIO (author)
2022-06-09
Patent
Electronic Resource
English
GAS PLUG, MEMBER FOR ELECTROSTATIC SUCTION AND PLASMA PROCESSING APPARATUS
| European Patent Office | 2020
| European Patent Office | 2023
| European Patent Office | 2023
| European Patent Office | 2023
| European Patent Office | 2023