A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
PLASMA-RESISTANT CERAMIC SUBSTRATE AND METHOD OF MANUFACTURING THE SAME
The present invention provides a plasma-resistant ceramic substrate including a bulk of an oxide composition; and a surface layer in which an oxide composition component constituting the bulk was modified to a composition including one or more anions selected from the group consisting of F− and Cl−, wherein the surface layer is a layer in which a raw material containing one or more anions selected from the group consisting of F− and Cl− is vaporized by heating and adsorbed on the surface of the ceramic substrate to be modified to a composition including one or more anions selected from the group consisting of F− and Cl−, and a method of manufacturing the same. According to the present invention, the plasma resistance and durability of the ceramic substrate can be improved at low cost.
PLASMA-RESISTANT CERAMIC SUBSTRATE AND METHOD OF MANUFACTURING THE SAME
The present invention provides a plasma-resistant ceramic substrate including a bulk of an oxide composition; and a surface layer in which an oxide composition component constituting the bulk was modified to a composition including one or more anions selected from the group consisting of F− and Cl−, wherein the surface layer is a layer in which a raw material containing one or more anions selected from the group consisting of F− and Cl− is vaporized by heating and adsorbed on the surface of the ceramic substrate to be modified to a composition including one or more anions selected from the group consisting of F− and Cl−, and a method of manufacturing the same. According to the present invention, the plasma resistance and durability of the ceramic substrate can be improved at low cost.
PLASMA-RESISTANT CERAMIC SUBSTRATE AND METHOD OF MANUFACTURING THE SAME
LEE SUNG MIN (author) / OH YOON SUK (author) / KIM HYEONG JUN (author) / OH GYUSANG (author)
2024-02-08
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
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