A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
PLASMA RESISTANT YTTRIUM ALUMINUM OXIDE CHAMBER COMPONENTS
Disclosed herein are plasma chamber components that comprise a ceramic sintered body comprising at least one first layer comprising a surface having a surface area and at least one crystalline phase of from 90% to 99.8% by volume of poly crystalline yttrium aluminum garnet (YAG), at least one second layer comprising alumina and zirconia wherein the zirconia comprises at least one of stabilized and partially stabilized zirconia, and optionally, at least one third layer comprising at least one selected from the group consisting of YAG, alumina, and zirconia.
PLASMA RESISTANT YTTRIUM ALUMINUM OXIDE CHAMBER COMPONENTS
Disclosed herein are plasma chamber components that comprise a ceramic sintered body comprising at least one first layer comprising a surface having a surface area and at least one crystalline phase of from 90% to 99.8% by volume of poly crystalline yttrium aluminum garnet (YAG), at least one second layer comprising alumina and zirconia wherein the zirconia comprises at least one of stabilized and partially stabilized zirconia, and optionally, at least one third layer comprising at least one selected from the group consisting of YAG, alumina, and zirconia.
PLASMA RESISTANT YTTRIUM ALUMINUM OXIDE CHAMBER COMPONENTS
DONELON MATTHEW JOSEPH (author) / WALKER LUKE (author) / BISTA SAURAV (author) / WAGHMARE SAURABH (author) / THOMPSON LILLIAN (author)
2024-02-22
Patent
Electronic Resource
English
PLASMA RESISTANT YTTRIUM ALUMINUM OXIDE CHAMBER COMPONENTS
| European Patent Office | 2022
YTTRIUM ALUMINUM COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS
| European Patent Office | 2023