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    Gate stack technology for nanoscale devices

    New search for: Byoung Hun Lee,
    New search for: Paul Kirsch,
    New search for: Seungchul Song,
    New search for: Rino Choi,
    New search for: Rajarao Jammy,

    The historical evolution of gate stack technology for silicon devices is reviewed to provide insight on the challenges in this technology for scaled nanoscale CMOS devices and non-Sibased devices.

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    Gate stack technology for nanoscale devices

    New search for: Byoung Hun Lee,
    New search for: Paul Kirsch,
    New search for: Seungchul Song,
    New search for: Rino Choi,
    New search for: Rajarao Jammy,

    The historical evolution of gate stack technology for silicon devices is reviewed to provide insight on the challenges in this technology for scaled nanoscale CMOS devices and non-Sibased devices.

    Access

    Check access
    Check availability in my library
    Order at Subito €

    Gate stack technology for nanoscale devices

    New search for: Byoung Hun Lee,
    New search for: Paul Kirsch,
    New search for: Seungchul Song,
    New search for: Rino Choi,
    New search for: Rajarao Jammy,

    The historical evolution of gate stack technology for silicon devices is reviewed to provide insight on the challenges in this technology for scaled nanoscale CMOS devices and non-Sibased devices.

    Access

    Check access
    Check availability in my library
    Order at Subito €

    Access

    Check access
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Gate stack technology for nanoscale devices

    Contributors:

    Byoung Hun Lee, (author) / Paul Kirsch, (author) / Seungchul Song, (author) / Rino Choi, (author) / Rajarao Jammy, (author)

    Published in:

    2006 IEEE Nanotechnology Materials and Devices Conference ; 1 ; 206-207

    Publication date:

    2006-10-01

    Size:

    457168 byte

    ISBN:

    978-1-4244-0541-1 , 978-1-4244-0540-4

    DOI:

    https://doi.org/10.1109/NMDC.2006.4388841

    Type of media:

    Conference paper

    Type of material:

    Electronic Resource

    Language:

    English

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