Heavy Water in Gate Stack Processing: Fid-Bau Portal

Heavy Water in Gate Stack Processing

Pap, A.E. / Ducso, C. / Kamaras, K. / Battistig, G. / Barsony, I.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Heavy Water in Gate Stack Processing

Pap, A.E. / Ducso, C. / Kamaras, K. / Battistig, G. / Barsony, I.

Heavy Water in Gate Stack Processing

Pap, A.E. / Ducso, C. / Kamaras, K. / Battistig, G. / Barsony, I.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Heavy Water in Gate Stack Processing

Contributors:

Pap, A.E. (author) / Ducso, C. (author) / Kamaras, K. (author) / Battistig, G. (author) / Barsony, I. (author) / Lerch, W. / Niess, J.

Published in:

Rapid Thermal Processing and beyond: Applications in Semiconductor Processing ; 119-132

MATERIALS SCIENCE FORUM ; 573/574

Publication date:

2008-01-01

Size:

14 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Byoung Hun Lee, / Paul Kirsch, / Seungchul Song, et al. | IEEE | 2006

Gate stack technology for nanoscale devices

Lee, B. H. / Oh, J. / Tseng, H. H. et al. | British Library Online Contents | 2006

Issues in High-kappa Gate Stack Interfaces

Misra, V. / Lucovsky, G. / Parsons, G. | British Library Online Contents | 2002

Electrical properties of SiO2/TiO2 high-k gate dielectric stack

Bera, M. K. / Maiti, C. K. | British Library Online Contents | 2006

HEAVY DUTY GATE LOCK

MARTIN TERRANCE | European Patent Office | 2018

Free access