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    Towards sub-10nm carrier profiling with spreading resistance techniques

    New search for: Clarysse, T.
    New search for: Eyben, P.
    New search for: Hantschel, T.
    New search for: Vandervorst, W.

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    Towards sub-10nm carrier profiling with spreading resistance techniques

    New search for: Clarysse, T.
    New search for: Eyben, P.
    New search for: Hantschel, T.
    New search for: Vandervorst, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Towards sub-10nm carrier profiling with spreading resistance techniques

    New search for: Clarysse, T.
    New search for: Eyben, P.
    New search for: Hantschel, T.
    New search for: Vandervorst, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Towards sub-10nm carrier profiling with spreading resistance techniques

    Contributors:

    Clarysse, T. (author) / Eyben, P. (author) / Hantschel, T. (author) / Vandervorst, W. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 61-66

    Publication date:

    2001-01-01

    Size:

    6 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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