A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Recrystallization of Si-, As-, and BF~2-Implanted, Bonded SOI
Recrystallization of Si-, As-, and BF~2-Implanted, Bonded SOI
Recrystallization of Si-, As-, and BF~2-Implanted, Bonded SOI
Tamura, M. (author) / Horiuchi, M. (author) / Ma, E. / Materials Research Society
Symposium, Phase transformations and systems driven far from equilibrium ; 1997 ; Boston; MA
1998-01-01
6 pages
Held as symposium B of the 1997 MRS Fall meeting
Conference paper
English
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