Investigation of the Range Distribution of Yb Ions Implanted in SOI: Fid-Bau Portal

International conference; 1st, Advanced engineering materials and architecture science; Materials science, civil engineering and architecture science, mechanical engineering and manufacturing technology: (ICAEMAS 2014) ; 2014 ; Xi'an, China

Published in:

Advanced engineering materials and architecture science; Materials science, civil engineering and architecture science, mechanical engineering and manufacturing technology: (ICAEMAS 2014) ; 269-272

APPLIED MECHANICS AND MATERIALS ; 488/489 part 1

Publication date:

2014-01-01

Size:

4 pages

Remarks:

Includes bibliographical references and indexes.

ISBN:

3037859768 , 9783037859766

ISSN:

1660-9336

Type of media:

Conference paper

Type of material:

Language:

English

Keywords:

Materials science , Civil engineering , Architecture , Mechanical engineering , Manufacturing processes , ICAEMAS

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