Plasma enhanced chemical vapour deposition of tungsten and tungsten silicide thin films

McClatchie, S. / Thomas, H. / Morgan, D. V. | British Library Online Contents | 1993

Low-temperature plasma-enhanced chemical vapour deposition of transfer-free graphene thin films

Othman, M. / Ritikos, R. / Muhammad Hafiz, S. et al. | British Library Online Contents | 2015

Hydrogen plasma-enhanced chemical vapour deposition of silicon carbide thin films from dodecamethylcyclohexasilane

Chiu, H.-T. / Huang, S.-C. | British Library Online Contents | 1993

Deposition of diamond-like carbon films by plasma enhanced chemical vapour deposition

Choi, S. S. / Kim, D. W. / Joe, J. W. et al. | British Library Online Contents | 1997

Microstructure of thin films prepared by plasma-enhanced chemical vapour deposition of helium-diluted silane

Carabe, J. / Ganda, J.J. / Gonzalez, N. et al. | British Library Online Contents | 1999