Effects of crystalline regrowth on dopant profiles in preamorphized silicon

Hopstaken, M. J. P. / Tamminga, Y. / Verheijen, M. A. et al. | British Library Online Contents | 2004

Excimer-laser doping of spin-on dopant in silicon

Wong, Y. W. / Yang, X. Q. / Chan, P. W. et al. | British Library Online Contents | 1993

Shallow boron dopant on silicon

Perez-Martin, A. M. / Jimenez-Rodriguez, J. J. / Jimenez-Saez, J. C. | British Library Online Contents | 2004

a-Si Capping SIMS for shallow dopant profiles

Miwa, S. | British Library Online Contents | 2004

Dopant enhanced H diffusion in amorphous silicon and its effect on the kinetics of solid phase epitaxy

Johnson, B. C. / Caradonna, P. / McCallum, J. C. | British Library Online Contents | 2009