Formation of buried Sb dopant profiles in silicon by pulsed laser epitaxy: Fid-Bau Portal

Formation of buried Sb dopant profiles in silicon by pulsed laser epitaxy

Carolissen, R. J. / Knoesen, D. K. / Sinke, W. C. / Pretorius, R.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Formation of buried Sb dopant profiles in silicon by pulsed laser epitaxy

Carolissen, R. J. / Knoesen, D. K. / Sinke, W. C. / Pretorius, R.

Formation of buried Sb dopant profiles in silicon by pulsed laser epitaxy

Carolissen, R. J. / Knoesen, D. K. / Sinke, W. C. / Pretorius, R.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Formation of buried Sb dopant profiles in silicon by pulsed laser epitaxy

Contributors:

Carolissen, R. J. (author) / Knoesen, D. K. (author) / Sinke, W. C. (author) / Pretorius, R. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 8 ; 841

Publication date:

1993-01-01

Size:

841 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

Hopstaken, M. J. P. / Tamminga, Y. / Verheijen, M. A. et al. | British Library Online Contents | 2004

Excimer-laser doping of spin-on dopant in silicon

Wong, Y. W. / Yang, X. Q. / Chan, P. W. et al. | British Library Online Contents | 1993

Shallow boron dopant on silicon

Perez-Martin, A. M. / Jimenez-Rodriguez, J. J. / Jimenez-Saez, J. C. | British Library Online Contents | 2004

Dopant enhanced H diffusion in amorphous silicon and its effect on the kinetics of solid phase epitaxy

Johnson, B. C. / Caradonna, P. / McCallum, J. C. | British Library Online Contents | 2009

a-Si Capping SIMS for shallow dopant profiles

Miwa, S. | British Library Online Contents | 2004