Ultrathin silicon dioxide films grown by photo-oxidation of silicon using 172 nm excimer lamps

Kaliwoh, N. / Zhang, J. Y. / Boyd, I. W. | British Library Online Contents | 2000

Characterization of excimer lamp photo-deposited ultrathin oxynitride films [2403-24]

Lynch, S. / O'Connor, G. M. / Crean, G. M. et al. | British Library Conference Proceedings | 1995

Deposition and annealing of tantalum pentoxide films using 172 nm excimer lamp

Zhang, J. Y. / Lim, B. / Boyd, I. W. | British Library Online Contents | 2000

Photochemical vapour deposition of hydrogenated amorphous silicon-carbon thin films by using a Xe^*~2 excimer lamp

Redondas, X. / Gonzalez, P. / Chiussi, S. et al. | British Library Online Contents | 1996

Characterisation of ultraviolet annealed tantalum oxide films deposited by photo-CVD using 172nm excimer lamp

Zhang, J. Y. / Dusastre, V. / Boyd, I. W. | British Library Online Contents | 2001