Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Direct photo-deposition of silicon dioxide films using a xenon excimer lamp

    New search for: Bergonzo, P.
    New search for: Kogelschatz, U.
    New search for: Boyd, I. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Direct photo-deposition of silicon dioxide films using a xenon excimer lamp

    New search for: Bergonzo, P.
    New search for: Kogelschatz, U.
    New search for: Boyd, I. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Direct photo-deposition of silicon dioxide films using a xenon excimer lamp

    New search for: Bergonzo, P.
    New search for: Kogelschatz, U.
    New search for: Boyd, I. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Direct photo-deposition of silicon dioxide films using a xenon excimer lamp

    Contributors:

    Bergonzo, P. (author) / Kogelschatz, U. (author) / Boyd, I. W. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 69 ; 393

    Publication date:

    1993-01-01

    Size:

    393 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Ultrathin silicon dioxide films grown by photo-oxidation of silicon using 172 nm excimer lamps

    Kaliwoh, N. / Zhang, J. Y. / Boyd, I. W. | British Library Online Contents | 2000

    Characterization of excimer lamp photo-deposited ultrathin oxynitride films [2403-24]

    Lynch, S. / O'Connor, G. M. / Crean, G. M. et al. | British Library Conference Proceedings | 1995

    Deposition and annealing of tantalum pentoxide films using 172 nm excimer lamp

    Zhang, J. Y. / Lim, B. / Boyd, I. W. | British Library Online Contents | 2000

    Photochemical vapour deposition of hydrogenated amorphous silicon-carbon thin films by using a Xe^*~2 excimer lamp

    Redondas, X. / Gonzalez, P. / Chiussi, S. et al. | British Library Online Contents | 1996

    Characterisation of ultraviolet annealed tantalum oxide films deposited by photo-CVD using 172nm excimer lamp

    Zhang, J. Y. / Dusastre, V. / Boyd, I. W. | British Library Online Contents | 2001

    Back to top