Anisotropic etching of the silicon crystal-surface free energy model

Lysko, J. M. | British Library Online Contents | 2003

Etching of CVD diamond films using oxygen ions in ECR plasma

Ma, Z. / Wu, J. / Shen, W. et al. | British Library Online Contents | 2014

Mechanism of anisotropic etching on diamond (111) surfaces by a hydrogen plasma treatment

Kuroshima, Hiroki / Makino, Toshiharu / Yamasaki, Satoshi et al. | British Library Online Contents | 2017

The Improvement of Wet Anisotropic Etching with Megasonic Wave

Che, W. S. / Suk, C. G. / Park, T. G. et al. | British Library Online Contents | 2005

Micromachined Multilevel Silicon Structure by Anisotropic Wet Etching

Chung, C.-K. | British Library Online Contents | 2002