Micromachined Multilevel Silicon Structure by Anisotropic Wet Etching

Chung, C.-K. | British Library Online Contents | 2002

Atomistic simulations of surface coverage effects in anisotropic wet chemical etching of crystalline silicon

Gosalvez, M. A. / Foster, A. S. / Nieminen, R. M. | British Library Online Contents | 2002

Anisotropic ECR Plasma Etching with Low-Energy Ions

Tobinaga, Y. / Miyano, T. / Fujimoto, K. et al. | British Library Online Contents | 1993

Anisotropic etching of silicon nitride at low temperatures by synchrotron radiation

Kitamura, O. / Goto, T. / Terakado, S. et al. | British Library Online Contents | 1994

Chemical Etching Behavior of Single-crystal Silicon Slice

Wen, J.-b. / Fan, L.-m. / Zhao, S.-l. et al. | British Library Online Contents | 2007