Reactive Ion Etching Induced Surface Damage of Silicon Carbide

Xia, J. H. / Rusli / Gopalakrishan, R. et al. | British Library Online Contents | 2005

Deep reactive ion etching and focused ion beam combination for nanotip fabrication

Villanueva, G. / Plaza, J. A. / Sánchez-Amores, A. et al. | British Library Online Contents | 2006

Reactive Ion Etching in the Fabrication of Niobium Tunnel Junctions

S. A. Reible | NTIS | 1980

Laser-assisted etching-like damage of Si

Simakin, A. V. / Shafeev, G. A. | British Library Online Contents | 1995

Reduction of etching damage in the fabrication of quantum wires

Yang, H. W. / Hsieh, J. T. / Hong, S. F. et al. | British Library Online Contents | 1994