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    Reactive Ion Beam Etching for Microcavity Surface Emitting Laser Fabrication: Technology and Damage Characterization

    New search for: Matsutani, A.
    New search for: Tadokoro, T.
    New search for: Koyama, F.
    New search for: Iga, K.

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    Reactive Ion Beam Etching for Microcavity Surface Emitting Laser Fabrication: Technology and Damage Characterization

    New search for: Matsutani, A.
    New search for: Tadokoro, T.
    New search for: Koyama, F.
    New search for: Iga, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Reactive Ion Beam Etching for Microcavity Surface Emitting Laser Fabrication: Technology and Damage Characterization

    New search for: Matsutani, A.
    New search for: Tadokoro, T.
    New search for: Koyama, F.
    New search for: Iga, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Reactive Ion Beam Etching for Microcavity Surface Emitting Laser Fabrication: Technology and Damage Characterization

    Contributors:

    Matsutani, A. (author) / Tadokoro, T. (author) / Koyama, F. (author) / Iga, K. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 641

    Publication date:

    1993-01-01

    Size:

    641 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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