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Corrosion behaviour of TiN films obtained by plasma-assisted chemical vapour deposition

In, C. B. / Kim, S. P. / Chun, J. S.

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Corrosion behaviour of TiN films obtained by plasma-assisted chemical vapour deposition

In, C. B. / Kim, S. P. / Chun, J. S.

Corrosion behaviour of TiN films obtained by plasma-assisted chemical vapour deposition

In, C. B. / Kim, S. P. / Chun, J. S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Corrosion behaviour of TiN films obtained by plasma-assisted chemical vapour deposition

Contributors:

In, C. B. (author) / Kim, S. P. (author) / Chun, J. S. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 29 ; 1818

Publication date:

1994-01-01

Size:

1818 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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