Photochemical vapour deposition of hydrogenated amorphous silicon-carbon thin films by using a Xe^*~2 excimer lamp

Redondas, X. / Gonzalez, P. / Chiussi, S. et al. | British Library Online Contents | 1996

Crystallization kinetics of hydrogenated amorphous silicon thick films grown by plasma-enhanced chemical vapour deposition

Farjas, J. / Rath, C. / Roura, P. et al. | British Library Online Contents | 2004

Deposition of hydrogenated amorphous silicon-carbon films by vacuum ultraviolet photo-CVD

Fujii, T. / Yoshimoto, M. / Fuyuki, T. et al. | British Library Online Contents | 1994

ArF-excimer laser induced chemical vapour deposition of amorphous hydrogenated SiGeC films

Lopez, E. / Chiussi, S. / Serra, C. et al. | British Library Online Contents | 2003

Amorphous germanium layers prepared by UV-photo-induced chemical vapour deposition

Chiussi, S. / Gonzalez, P. / Serra, J. et al. | British Library Online Contents | 1996