Metallization of Polypyrrole Films

Hepel, M. / Chen, Y.-M. / Stephenson, R. et al. | British Library Conference Proceedings | 1995

Copper-Based Metallization in ULSI Structures

Li, J. / Seidel, T. E. / Mayer, J. W. | British Library Online Contents | 1994

Copper-Based Metallization for ULSI Applications

Li, J. / Blewer, R. S. / Mayer, J. W. | British Library Online Contents | 1993

Copper Metallization Technology for Deep Submicron ULSIs

Arita, Y. / Awaya, N. / Ohno, K. et al. | British Library Online Contents | 1994

Copper Metallization for High Performance Silicon Technology

Rosenberg, R. / Edelstein, D. C. / Hu, C.-K. et al. | British Library Online Contents | 2000