Digital etching of GaAs

Meguro, T. / Aoyagi, Y. | British Library Online Contents | 1997

Modeling of altered layer formation during reactive ion etching of GaAs

Mutzke, A. / Rai, A. / Schneider, R. et al. | British Library Online Contents | 2012

Improving reactive ion etching selectivity of GaAs/AlGaAs with He plus

Lin, C. S. / Fang, Y. K. / Chen, S. F. et al. | British Library Online Contents | 2004

Deep reactive ion etching of PMMA

Zhang, C. / Yang, C. / Ding, D. | British Library Online Contents | 2004

Evaluation of reactive ion etching processes for fabrication of integrated GaAs/AlGaAs optoelectronic devices

Aperathitis, E. / Cengher, D. / Kayambaki, M. et al. | British Library Online Contents | 2001