Improving reactive ion etching selectivity of GaAs/AlGaAs with He plus

Lin, C. S. / Fang, Y. K. / Chen, S. F. et al. | British Library Online Contents | 2004

Parametric investigations and simulations of ion beam etching and reactive ion etching mechanisms for GaAs compounds

Ketata, K. / Koumetz, S. / Latry, O. et al. | British Library Online Contents | 1994

Digital etching of GaAs

Meguro, T. / Aoyagi, Y. | British Library Online Contents | 1997

Evaluation of reactive ion etching processes for fabrication of integrated GaAs/AlGaAs optoelectronic devices

Aperathitis, E. / Cengher, D. / Kayambaki, M. et al. | British Library Online Contents | 2001

Oxide via hole formation using magnetically enhance reactive ion etching

Kim, B. / Park, J. | British Library Online Contents | 2005