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Photo-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbon using an internal discharge lamp

Miyajima, S. / Milne, W. I. / Yoon, S. F. / Tan, H. S.

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Photo-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbon using an internal discharge lamp

Miyajima, S. / Milne, W. I. / Yoon, S. F. / Tan, H. S.

Photo-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbon using an internal discharge lamp

Miyajima, S. / Milne, W. I. / Yoon, S. F. / Tan, H. S.

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Order at Subito €

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Document information

Title:

Photo-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbon using an internal discharge lamp

Contributors:

Miyajima, S. (author) / Milne, W. I. (author) / Yoon, S. F. (author) / Tan, H. S. (author) / Henini, M. / Szweda, R.

Published in:

Low Dimensional Structures and Devices ; 138-144

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 35

Publication date:

1995-01-01

Size:

7 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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