AIN thin films by plasma-enhanced chemical vapour deposition

Lee, C. H. / Wu, C. T. / Pueng, C. Y. | British Library Online Contents | 1992

Deposition of crystalline C3N4 films via microwave plasma chemical vapour deposition

Jiang, J. / Cheng, W. / Zhang, Y. et al. | British Library Online Contents | 2007

Preparation of transparent water-repellent films by radio-frequency plasma-enhanced chemical vapour deposition

Hozumi, A. / Sekoguchi, H. / Kakinoki, N. et al. | British Library Online Contents | 1997

Deposition of diamond-like carbon films by plasma enhanced chemical vapour deposition

Choi, S. S. / Kim, D. W. / Joe, J. W. et al. | British Library Online Contents | 1997

Preparation of silicon oxide films by ultraviolet-assisted rf plasma-enhanced chemical vapour deposition

Hozumi, A. / Sugimoto, N. / Sekoguchi, H. et al. | British Library Online Contents | 1997