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    Preparation of BN films by r.f. thermal plasma chemical vapour deposition

    New search for: Matsumoto, S.
    New search for: Nishida, N.
    New search for: Akashi, K.
    New search for: Sugai, K.

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    Preparation of BN films by r.f. thermal plasma chemical vapour deposition

    New search for: Matsumoto, S.
    New search for: Nishida, N.
    New search for: Akashi, K.
    New search for: Sugai, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Preparation of BN films by r.f. thermal plasma chemical vapour deposition

    New search for: Matsumoto, S.
    New search for: Nishida, N.
    New search for: Akashi, K.
    New search for: Sugai, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Preparation of BN films by r.f. thermal plasma chemical vapour deposition

    Contributors:

    Matsumoto, S. (author) / Nishida, N. (author) / Akashi, K. (author) / Sugai, K. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE ; 31 ; 713-720

    Publication date:

    1996-01-01

    Size:

    8 pages

    ISSN:

    0022-2461

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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