AIN thin films by plasma-enhanced chemical vapour deposition

Lee, C. H. / Wu, C. T. / Pueng, C. Y. | British Library Online Contents | 1992

Deposition of diamond-like carbon films by plasma enhanced chemical vapour deposition

Choi, S. S. / Kim, D. W. / Joe, J. W. et al. | British Library Online Contents | 1997

Preparation of silicon oxide films by ultraviolet-assisted rf plasma-enhanced chemical vapour deposition

Hozumi, A. / Sugimoto, N. / Sekoguchi, H. et al. | British Library Online Contents | 1997

Preparation of BN films by r.f. thermal plasma chemical vapour deposition

Matsumoto, S. / Nishida, N. / Akashi, K. et al. | British Library Online Contents | 1996

Silica coating of aluminium nitride particles by radio-frequency plasma chemical vapour deposition

Tsugeki, K. / Yan, S. / Maeda, H. et al. | British Library Online Contents | 1994