Chemical and structural properties of polymorphous silicon thin films grown from dichlorosilane

Alvarez-Macias, C. / Monroy, B. M. / Huerta, L. et al. | British Library Online Contents | 2013

Synchrotron Radiation Photoemission and Infrared Spectroscopy Study of Adsorption and Decomposition of Dichlorosilane on Si(100)(2 x 1)

Kanakura, N. / Shinohara, M. / Watanabe, H. et al. | British Library Online Contents | 2002

In-Grown Stacking Faults in SiC-CVD using Dichlorosilane and Propane as Precursors

Song, H.Z. / Omar, S.U. / Rana, T. et al. | British Library Online Contents | 2012

Atomistic modeling of chemical vapor deposition: silicon nitride CVD from dichlorosilane and ammonia

Bagatur`yants, A. A. / Novoselov, K. P. / Safonov, A. A. et al. | British Library Online Contents | 2000

Kinetics of dissociative hydrogen adsorption on the (100) nickel single crystal face: a statistical rate theory approach

Panczyk, T. / Rudzinski, W. | British Library Online Contents | 2004