Kinetics of dissociative adsorption of dichlorosilane on Si(100)2 x 1: Fid-Bau Portal

Kinetics of dissociative adsorption of dichlorosilane on Si(100)2 x 1

Sakamoto, H. / Takakuwa, Y. / Hori, T. / Horie, T. / Suemitsu, M. / Miyamoto, N.

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Kinetics of dissociative adsorption of dichlorosilane on Si(100)2 x 1

Sakamoto, H. / Takakuwa, Y. / Hori, T. / Horie, T. / Suemitsu, M. / Miyamoto, N.

Kinetics of dissociative adsorption of dichlorosilane on Si(100)2 x 1

Sakamoto, H. / Takakuwa, Y. / Hori, T. / Horie, T. / Suemitsu, M. / Miyamoto, N.

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Title:

Kinetics of dissociative adsorption of dichlorosilane on Si(100)2 x 1

Contributors:

Sakamoto, H. (author) / Takakuwa, Y. (author) / Hori, T. (author) / Horie, T. (author) / Suemitsu, M. (author) / Miyamoto, N. (author)

Published in:

APPLIED SURFACE SCIENCE ; 107 ; 68-74

Publication date:

1996-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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