Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
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Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems
Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems
Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems
Bhushan, B. (Autor:in) / Li, X. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 12 ; 54-63
01.01.1997
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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