Monitoring of atomic layer deposition by incremental dielectric reflection

Rosental, A. / Adamson, P. / Gerst, A. et al. | British Library Online Contents | 1996

Atomic layer controlled deposition of silicon nitride and in situ growth observation by infrared reflection absorption spectroscopy

Yokoyama, S. / Goto, H. / Miyamoto, T. et al. | British Library Online Contents | 1997

Surface of TiO"2 during atomic layer deposition as determined by incremental dielectric reflection

Rosental, A. / Tarre, A. / Adamson, P. et al. | British Library Online Contents | 1999

Novel materials by atomic layer deposition and molecular layer deposition

Leskela, M. / Ritala, M. / Nilsen, O. | British Library Online Contents | 2011

In Situ Diagnostics

Dua, Ashok Kumar | Trans Tech Publications | 2004