Surface of TiO"2 during atomic layer deposition as determined by incremental dielectric reflection

Rosental, A. / Tarre, A. / Adamson, P. et al. | British Library Online Contents | 1999

Atomic layer deposition HfO2 capping layer effect on porous low dielectric constant materials

Cheng, Y. L. / Kao, K. C. / Huang, C. J. et al. | British Library Online Contents | 2015

Atomic layer deposition in traveling-wave reactor: In situ diagnostics by optical reflection

Rosental, A. / Adamson, P. / Gerst, A. et al. | British Library Online Contents | 1997

The formation of a dielectric SiNxCy sealing layer using an atomic layer deposition technique

Kim, Doyoung / Kim, Soo-Hyun / Kim, Hyungjun | British Library Online Contents | 2015

Novel materials by atomic layer deposition and molecular layer deposition

Leskela, M. / Ritala, M. / Nilsen, O. | British Library Online Contents | 2011