Control of Al-implantation doping in 4H-SiC

Pernot, J. / Camassel, J. / Contreras, S. et al. | British Library Online Contents | 2001

3.1 Doping Techniques: Ion Implantation

Gabor, H. ;Fahrner, Wolfgang R. | Trans Tech Publications | 2000

Transport Investigation of Low-Nitrogen-Doped 6H-SiC Ion-Implantation vs. In Situ Doping

Terziyska, P. / Pernot, J. / Contreras, S. et al. | British Library Online Contents | 2003

N-type implantation doping of GaN

Nakano, Y. / Kachi, T. / Jimbo, T. | British Library Online Contents | 2003

Beryllium Implantation Doping of Silicon Carbide

Henkel, T. / Tanaka, Y. / Kobayashi, N. et al. | British Library Online Contents | 2000