Incorporation of the D-Center in SiC Controlled either by Coimplantation of Si/B and C/B or by Site-Competition Epitaxy: Fid-Bau Portal

Incorporation of the D-Center in SiC Controlled either by Coimplantation of Si/B and C/B or by Site-Competition Epitaxy

Frank, T. / Troffer, T. / Pensl, G. / Nordell, N. / Karlsson, S. / Schoener, A.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren

Incorporation of the D-Center in SiC Controlled either by Coimplantation of Si/B and C/B or by Site-Competition Epitaxy

Frank, T. / Troffer, T. / Pensl, G. / Nordell, N. / Karlsson, S. / Schoener, A.

Incorporation of the D-Center in SiC Controlled either by Coimplantation of Si/B and C/B or by Site-Competition Epitaxy

Frank, T. / Troffer, T. / Pensl, G. / Nordell, N. / Karlsson, S. / Schoener, A.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren

Dokumentinformationen

Titel:

Incorporation of the D-Center in SiC Controlled either by Coimplantation of Si/B and C/B or by Site-Competition Epitaxy

Beteiligte:

Frank, T. (Autor:in) / Troffer, T. (Autor:in) / Pensl, G. (Autor:in) / Nordell, N. (Autor:in) / Karlsson, S. (Autor:in) / Schoener, A. (Autor:in)

Erschienen in:

MATERIALS SCIENCE FORUM ; 264/268 ; 681-684

Erscheinungsdatum:

01.01.1998

Format / Umfang:

4 pages

ISSN:

0255-5476

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

Tanaka, Y. / Kobayashi, N. / Hasegawa, M. et al. | British Library Online Contents | 2000

Coimplantation Effects on the Electrical Properties of Boron and Aluminum Acceptors in 4H-SiC

Itoh, H. / Troffer, T. / Pensl, G. | British Library Online Contents | 1998

Effects of oxygen coimplantation on the formation of donor centers in erbium-implanted silicon

Emtsev Jr, V. V. / Poloskin, D. S. / Shek, E. I. et al. | British Library Online Contents | 2001

Wear of steels after implantation of aluminium and coimplantation of aluminium and oxygen ions

Langguth, K. / Ryssel, H. | British Library Online Contents | 1993

Investigation of 6H-SiC site competition epitaxy the silane-methane-hydrogen gas system

Zelenin, V.V. / Lebedev, A.A. / Rastegaeva, M.G. et al. | British Library Online Contents | 1999

Nach oben