Surface morphology determination of LPCVD homoepitaxial diamond using scanning tunnelling and atomic force microscopy

Maguire, H. G. / Kamo, M. / Lang, H. P. et al. | British Library Online Contents | 1992

In Situ Boron and Aluminum Doping and Their Memory Effects in 4H-SiC Homoepitaxial Layers Grown by Hot-Wall LPCVD

Sun, G.S. / Zhao, Y.M. / Wang, L. et al. | British Library Online Contents | 2009

Growth rate modeling for selective tungsten LPCVD

Wolf, H. / Streiter, R. / Schulz, S. E. et al. | British Library Online Contents | 1996

Low temperature Si epitaxy in a vertical LPCVD batch reactor

Ritter, G. / Harrington, J. / Tillack, B. et al. | British Library Online Contents | 2000

Growth of Titanium Dioxide Thin Films by LPCVD

Li, W.-y. / Li, G. / Cai, X. et al. | British Library Online Contents | 2003