Residual Stress in Thin Films of RF-Sputtered Aluminum by X-Ray Multiaxial Stress Measurement

Ejiri, S. / Lin, Z. / Sasaki, T. et al. | British Library Online Contents | 1997

Residual Stress Measurement in Sputtered Copper Thin Films by Synchrotron Radiation and Ordinary X-Rays

Hataya, M. / Hanabusa, T. / Kusaka, K. et al. | British Library Online Contents | 2005

Evaluation of residual stress in sputtered tantalum thin-film

Al-masha'al, Asa'ad / Bunting, Andrew / Cheung, Rebecca | British Library Online Contents | 2016

Residual stress and microstructure of as-deposited and annealed, sputtered yttria-stabilized zirconia thin films

Quinn, D.J. / Wardle, B. / Spearing, S.M. | British Library Online Contents | 2008

The Effects of Crystallization on Mechanical Mechanism and Residual Stress of Sputtered Ag Thin Films

Hung, F.Y. / Lui, T.S. / Hu, Z.S. et al. | British Library Online Contents | 2012