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Epitaxial growth of -SiC on silicon by bias-assisted hot filament chemical vapor deposition from solid graphite and silicon sources
Epitaxial growth of -SiC on silicon by bias-assisted hot filament chemical vapor deposition from solid graphite and silicon sources
Epitaxial growth of -SiC on silicon by bias-assisted hot filament chemical vapor deposition from solid graphite and silicon sources
Woo, H. K. (Autor:in) / Lee, C. S. (Autor:in) / Bello, I. (Autor:in) / Lee, S. T. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 13 ; 1738-1740
01.01.1998
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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