Nanometre Scale Reactive Ion Etching of GaN Epilayers

Coquillat, D. / Murad, S. K. / Ribayrol, A. et al. | British Library Online Contents | 1998

Reproducibility of a Nanometre Accurate Moving-Scale Measurement System

Bosmans, N. / Qian, J. / Reynaerts, D. | British Library Online Contents | 2014

Fabrication and photoluminescence of GaN/sapphire submicron-scale structures with nanometre scale resolution

Ribayrol, A. / Coquillat, D. / De La Rue, R.M. et al. | British Library Online Contents | 1999

Electron beam lithography: resolution limits and applications

Vieu, C. / Carcenac, F. / Pepin, A. et al. | British Library Online Contents | 2000

Dopant based electron beam lithography in CuxTiSe2

Kidd, T. E. / Klein, D. / Rash, T. A. et al. | British Library Online Contents | 2011