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Structural defect visualization and oxide breakdown in SiC wafers after thermal oxidation
Structural defect visualization and oxide breakdown in SiC wafers after thermal oxidation
Structural defect visualization and oxide breakdown in SiC wafers after thermal oxidation
Sudarshan, T.S. (Autor:in) / Soloviev, S. (Autor:in) / Khlebnikov, I. (Autor:in) / Madangarli, V. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 464 - 467
01.01.1999
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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